Login Preferences
About News Publications Statistics Downloads API Guide License How to use Preferences
bn:02308057n
Noun Concept
Categories: Lithography (microfabrication)
EN
phase-shift mask  alternating phase-shift mask  Alternating phase shift mask  Attenuated phase-shift mask  Attenuating-phase-shifting mask
EN
Phase-shift masks are photomasks that take advantage of the interference generated by phase differences to improve image resolution in photolithography. Wikipedia
Definitions
Sources
EN
Phase-shift masks are photomasks that take advantage of the interference generated by phase differences to improve image resolution in photolithography. Wikipedia
Photomasks that take advantage of interference to improve image resolution in photolithography Wikipedia Disambiguation
Resolution-improving photomask Wikidata
Wikipedia
EN
phase-shift mask
Wikidata
EN
Phase-shift mask
Wikipedia Redirections
EN
alternating phase-shift mask, Alternating phase shift mask, Attenuated phase-shift mask, Attenuating-phase-shifting mask, Attenuating phase-shift mask, Attenuating phase-shifting mask, phase-shift masks, phase-shift photomask, phase-shifting mask, phase-shifting masks, Phase shift mask, Phase shifting mask

Please note that, in order to improve your browsing experience on this website, BabelNet® uses various types of cookies, including: browsing functionality, performance and statistical cookies.

By continuing to browse the site you are agreeing to our use of cookies. OK

License